Invention Grant
- Patent Title: Substrate support
- Patent Title (中): 基材支持
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Application No.: US13515096Application Date: 2010-03-18
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Publication No.: US09228256B2Publication Date: 2016-01-05
- Inventor: Torsten Kornmeyer
- Applicant: Torsten Kornmeyer
- Applicant Address: DE Windhagen
- Assignee: KGT GRAPHIT TECHNOLOGIE GMBH
- Current Assignee: KGT GRAPHIT TECHNOLOGIE GMBH
- Current Assignee Address: DE Windhagen
- Agency: Heslin Rothenberg Farley & Mesiti P.C.
- Priority: DE102009057790 20091211
- International Application: PCT/EP2010/053516 WO 20100318
- International Announcement: WO2011/069687 WO 20110616
- Main IPC: C23C16/458
- IPC: C23C16/458 ; C23C14/50 ; H01L21/677 ; H01L21/687

Abstract:
A substrate support for receiving substrates or wafers to be processed and for transporting said substrates or wafers in or through processing installations has universal application, is easily adaptable for specific tasks and is economical in use of material. Within a frame made of longitudinal and transverse supports, a plurality of longitudinal and transverse members are arranged intersecting in a grid-like manner, such that a base grid for directly or indirectly receiving substrates is formed. Both the longitudinal and transverse supports and the longitudinal and transverse members are positively connected to one another.
Public/Granted literature
- US20120279443A1 SUBSTRATE SUPPORT Public/Granted day:2012-11-08
Information query
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