Invention Grant
- Patent Title: Electrostatic pressure sensor
- Patent Title (中): 静电压力传感器
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Application No.: US14141654Application Date: 2013-12-27
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Publication No.: US09228913B2Publication Date: 2016-01-05
- Inventor: Takuya Ishihara , Hidenobu Tochigi
- Applicant: Azbil Corporation
- Applicant Address: JP Tokyo
- Assignee: AZBIL CORPORATION
- Current Assignee: AZBIL CORPORATION
- Current Assignee Address: JP Tokyo
- Agency: Troutman Sanders LLP
- Priority: JP2012-284704 20121227
- Main IPC: G01L9/12
- IPC: G01L9/12 ; G01L9/00 ; G01L19/06

Abstract:
An electrostatic pressure sensor has a supporting diaphragm bonded to be held between first and second pedestal plates, a sensor chip supported on a top face of a center portion of the second pedestal plate. The supporting diaphragm has in the center portion thereof a large-diameter hole that forms a slit-shaped space between the first and second pedestal plates. The first pedestal plate has at least one inlet hole, for the fluid being measured, connecting to the slit-shaped space. The second pedestal plate has at least an outlet hole, connecting to the slit-shaped space, for directing the fluid being measured to the pressure-sensitive diaphragm of the sensor chip. The pedestal plate has an inlet hole of the first pedestal plate and an outlet hole of the second pedestal plate do not overlap each other in the direction of thickness of the first and second pedestal plates.
Public/Granted literature
- US20140182386A1 ELECTROSTATIC PRESSURE SENSOR Public/Granted day:2014-07-03
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