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US09228916B2 Self calibrating micro-fabricated load cells 有权
自校准微型称重传感器

Self calibrating micro-fabricated load cells
Abstract:
Self calibrating micro-fabricated load cells are disclosed. According to one embodiment, a self calibrating load cell comprises a resonant double ended tuning fork force sensor and a phase locked loop circuit for detection of frequency changes upon external load application to the resonant double ended tuning fork force sensor.
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