Invention Grant
US09228967B2 Micro-hotplate device and sensor comprising such micro-hotplate device
有权
微电镀装置和包含这种微电镀装置的传感器
- Patent Title: Micro-hotplate device and sensor comprising such micro-hotplate device
- Patent Title (中): 微电镀装置和包含这种微电镀装置的传感器
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Application No.: US14414068Application Date: 2013-07-16
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Publication No.: US09228967B2Publication Date: 2016-01-05
- Inventor: Christine Alepee , Nicolas Moser
- Applicant: SGX SENSORTECH SA
- Applicant Address: CH Corcelles
- Assignee: SGX SENSORTECH SA
- Current Assignee: SGX SENSORTECH SA
- Current Assignee Address: CH Corcelles
- Agency: Koppel, Patrick, Heybl & Philpott
- Priority: WOPCT/EP2012/063931 20120716
- International Application: PCT/EP2013/065037 WO 20130716
- International Announcement: WO2014/012948 WO 20140123
- Main IPC: G01N15/06
- IPC: G01N15/06 ; G01N33/00 ; G01N33/48 ; G01N27/12 ; G01N27/18

Abstract:
The present invention relates to a micro-hotplate device comprising a frame, a membrane, an active area comprising at least one active layer, and a heating structure designed to heat said active layer, said heating structure having concentric tracks and comprising inner tracks (20) and inner spaces (22) and outer tracks (24) and outer spaces (26) as being the one or two tracks and spaces located the furthest away from the center of the heating structure, characterized in that said outer tracks (24) are designed to be located closer to their neighboring tracks and/or are designed to have a width which is lower than those of the inner tracks (20), the width and the spacing of said inner tracks (20) being substantially constant.
Public/Granted literature
- US20150212030A1 MICRO-HOTPLATE DEVICE AND SENSOR COMPRISING SUCH MICRO-HOTPLATE DEVICE Public/Granted day:2015-07-30
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