Invention Grant
- Patent Title: Die attach pick error detection
- Patent Title (中): 模附件拾取错误检测
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Application No.: US13926969Application Date: 2013-06-25
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Publication No.: US09229058B2Publication Date: 2016-01-05
- Inventor: Dale Ohmart , Balamurugan Subramanian , Renato Heracleo Orduna Leano , Sonny Evangelista Dipasupil , Ronald Jay V. Peralta
- Applicant: Texas Instruments Incorporated
- Applicant Address: US TX Dallas
- Assignee: TEXAS INSTRUMENTS INCORPORATED
- Current Assignee: TEXAS INSTRUMENTS INCORPORATED
- Current Assignee Address: US TX Dallas
- Agent Steven A. Shaw; Frank D. Cimino
- Main IPC: G01R31/00
- IPC: G01R31/00 ; G01R31/3185 ; G01R31/28

Abstract:
Embodiments of the invention provide a method to detect pick and place indexing errors on each manufacturing batch (lot) of semiconductor wafer processed during a die attach process using a preselected skeleton of check die. The known locations of the check skeleton die are verified during picking of die from the wafer. If the check skeleton cannot be correctly verified at the known locations, then a pick error is indicated. The embodiments may be implemented on existing die attach equipment.
Public/Granted literature
- US20140002128A1 Die Attach Pick Error Detection Public/Granted day:2014-01-02
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