Invention Grant
US09229158B2 Method for production of optical waveguides and coupling and devices made from the same
有权
用于生产光波导和耦合的方法及由其制成的器件
- Patent Title: Method for production of optical waveguides and coupling and devices made from the same
- Patent Title (中): 用于生产光波导和耦合的方法及由其制成的器件
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Application No.: US14682803Application Date: 2015-04-09
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Publication No.: US09229158B2Publication Date: 2016-01-05
- Inventor: Payam Rabiei
- Applicant: Payam Rabiei
- Agency: Invent Capture, LLC.
- Agent Samuel S. Cho
- Main IPC: G02B6/122
- IPC: G02B6/122 ; G02B6/10 ; G02B6/02 ; G02B6/036 ; C23C14/34

Abstract:
Novel processing methods for production of high-refractive index contrast and low loss optical waveguides are disclosed. In one embodiment, a novel waveguide is produced by first depositing or growing a first low refractive index material layer as a cladding layer on top of a base substrate. Then, a first high refractive index material layer is deposited or transferred to the top of the cladding layer to form a slab core region. Subsequently, a second high refractive index material layer is deposited on top of the slab core region, and an etch mask layer is formed. Furthermore, the second high refractive index material layer is selectively etched by utilizing a dry-etching tool with high selectivity to the etch mask layer, and a second low refractive index material layer is deposited as a top cladding layer to encapsulate the second high refractive index material layer on top of lower cladding layers.
Public/Granted literature
- US20150323737A1 METHOD FOR PRODUCTION OF OPTICAL WAVEGUIDES AND COUPLING AND DEVICES MADE FROM THE SAME Public/Granted day:2015-11-12
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