Invention Grant
- Patent Title: Autofocus device and autofocusing method for an imaging device
- Patent Title (中): 用于成像装置的自动对焦装置和自动对焦方法
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Application No.: US12863824Application Date: 2009-01-20
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Publication No.: US09229209B2Publication Date: 2016-01-05
- Inventor: Michael Arnz , Mikhail Levtonov , Gerd Klose , Volkmar Betz
- Applicant: Michael Arnz , Mikhail Levtonov , Gerd Klose , Volkmar Betz
- Applicant Address: DE Oberkochen
- Assignee: Carl Zeiss SMT GmbH
- Current Assignee: Carl Zeiss SMT GmbH
- Current Assignee Address: DE Oberkochen
- Agency: Fish & Richardson P.C.
- Priority: DE102008005355 20080121; DE102008005356 20080121
- International Application: PCT/EP2009/000313 WO 20090120
- International Announcement: WO2009/092555 WO 20090730
- Main IPC: H04N5/232
- IPC: H04N5/232 ; G02B21/24

Abstract:
An autofocus device for an imaging device is provided, which has an imaging optic having a first focal plane and an object table for moving an object to be imaged relative to the first focal plane, wherein said autofocus device comprises a) an image recording module having a second focal plane, the location thereof relative to the first focal plane being known, b) a lighting module (BM) for imaging a focusing image along a lighting beam path in a focusing image plane such that, if the object is positioned in a target position at a predetermined distance to the second focal plane, the lighting beam path is folded because of reflection on the object and the focusing image, which lies in the focusing image plane, intersects the second focal plane or lies therein, and c) a control module, which activates the object table to focus the imaging device so that the object is positioned in the target position, from a signal of the image recording module, which the image recording module generates on the basis of the recording thereof of the focusing image when the object is positioned in the target position, derives the deviation of the object position from the target position, and, based on the derived deviation, the predetermined distance, and the relative location of the first and second focal planes, activates the object table so that the object is positioned in the first focal plane.
Public/Granted literature
- US20110134308A1 AUTOFOCUS DEVICE AND AUTOFOCUSING METHOD FOR AN IMAGING DEVICE Public/Granted day:2011-06-09
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