Analysis of an electromagnetic wave traveling in an optical device, can be performed quickly and correctly. A structure forming process simulator forms an analysis structure of a physical object to be analyzed. A hybrid optical simulator calculates time-independent data and time-dependent data of an electromagnetic field by dividing the analysis structure into parts, determining whether a metallic or magnetic material is included in each of the divided parts, and selectively applying a Beam Propagation Method (BPM) or a Finite Difference Time Domain (FDTD) method to the divided parts. A storage device stores the time-independent data and the time-dependent data output from the hybrid optical simulator as hybrid electric field data. Related methods are also described.