Invention Grant
- Patent Title: Semiconductor optical device and method for manufacturing semiconductor optical device
- Patent Title (中): 半导体光学器件及半导体光学器件的制造方法
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Application No.: US14454951Application Date: 2014-08-08
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Publication No.: US09229293B2Publication Date: 2016-01-05
- Inventor: Naoya Kono , Hideki Yagi , Takamitsu Kitamura
- Applicant: SUMITOMO ELECTRIC INDUSTRIES, LTD.
- Applicant Address: JP Osaka
- Assignee: SUMITOMO ELECTRIC INDUSTRIES, LTD.
- Current Assignee: SUMITOMO ELECTRIC INDUSTRIES, LTD.
- Current Assignee Address: JP Osaka
- Agency: Smith, Gambrell & Russell LLP.
- Priority: JP2013-166946 20130809
- Main IPC: G02B6/26
- IPC: G02B6/26 ; G02F1/225 ; G02B6/122 ; G02B6/136 ; G02F1/21 ; G02B6/293

Abstract:
A method for manufacturing a semiconductor optical device includes the steps of growing a stacked layer including lower and upper core layers, a first upper region including a non-doped layer, a second upper region including a p-type layer, and a cap layer; forming an upper mesa by etching the stacked layer; selectively etching the cap layer in the upper mesa on the first and second regions; forming a mask on the upper mesa in the second and third regions; and etching the upper mesa using the mask so as to form first to fourth mesa portions. The first and fourth mesa portions are formed by etching the first and second upper regions, and the second upper region and the cap layer, respectively. The second and third mesa portions are formed by etching the first and second upper regions, and the second upper region and the cap layer, respectively.
Public/Granted literature
- US20150043867A1 SEMICONDUCTOR OPTICAL DEVICE AND METHOD FOR MANUFACTURING SEMICONDUCTOR OPTICAL DEVICE Public/Granted day:2015-02-12
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