Invention Grant
- Patent Title: Circuit apparatus having a rounded trace
- Patent Title (中): 具有圆形轨迹的电路装置
-
Application No.: US12870041Application Date: 2010-08-27
-
Publication No.: US09229318B2Publication Date: 2016-01-05
- Inventor: Matthew S. Doyle , Joseph Kuczynski , Kevin A. Splittstoesser , Timothy J. Tofil
- Applicant: Matthew S. Doyle , Joseph Kuczynski , Kevin A. Splittstoesser , Timothy J. Tofil
- Applicant Address: KY Grand Cayman
- Assignee: GLOBALFOUNDRIES INC.
- Current Assignee: GLOBALFOUNDRIES INC.
- Current Assignee Address: KY Grand Cayman
- Agency: Roberts Mlotkowski Safran & Cole, P.C.
- Agent Anthony Canale; Andrew M. Calderon
- Main IPC: G03F7/20
- IPC: G03F7/20 ; G03F7/00 ; C25D5/02 ; H05K3/18

Abstract:
In various embodiments of the present invention a circuit apparatus having a rounded trace, a method to manufacture the circuit apparatus, and a design structure used in the design, testing, or manufacturing of the circuit apparatus are described. An artwork layer having an adaptable-mask section allows a graded amount of light to pass into an underlying photoresist layer. Subsequent to developing the photoresist layer, the graded amount of light creates a rounded geometric void used as a mold or sidewall for the creation of at least a portion of a rounded trace. The photoresist layer is removed resulting in a circuit apparatus having a rounded trace.
Public/Granted literature
- US20120052417A1 Circuit Apparatus Having a Rounded Trace Public/Granted day:2012-03-01
Information query
IPC分类: