Invention Grant
US09229456B2 Method of and system for calibrating gas flow dilutors 有权
校准气体流量调节器的方法和系统

Method of and system for calibrating gas flow dilutors
Abstract:
The preferred embodiments described herein make possible to use lower cost, fixed flow components, such as critical orifices, which are fast to stabilize to a steady flow. These cannot be adjusted to achieve equal flows but are selected to be sensibly close to their desired flow values. This embodiment determines the true ratios of the flows of all of the flow controlling components. Actual flows are not measured but near equal flows are each fed to a common flow meter and the ratio of the indicated flow meter readings is taken to be the same as the ratio of the flows. Two, near equal flows are then combined and compared to a single flow of approximately the same value, and so on. The flow meter is used only to compare near equal flows so does not need to be calibrated nor linear over a wide range.
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