Invention Grant
- Patent Title: Micro-electro-mechanical switch beam construction with minimized beam distortion and method for constructing
- Patent Title (中): 微电机械开关梁结构,最小化波束失真和构造方法
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Application No.: US14150513Application Date: 2014-01-08
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Publication No.: US09230751B2Publication Date: 2016-01-05
- Inventor: Denis Ellis , Padraig Fitzgerald , Jo-ey Wong , Raymond Goggin , Richard Tarik Eckl
- Applicant: Analog Devices, Inc.
- Applicant Address: US MA Norwood
- Assignee: ANALOG DEVICES, INC.
- Current Assignee: ANALOG DEVICES, INC.
- Current Assignee Address: US MA Norwood
- Agency: Kenyon & Kenyon LLP
- Main IPC: H01H51/22
- IPC: H01H51/22 ; H01H11/00 ; H01H59/00 ; H01H1/00 ; B81B3/00

Abstract:
Disclosed is a micro-electro-mechanical switch, including a substrate having a gate connection, a source connection, a drain connection and a switch structure, coupled to the substrate. The switch structure includes a beam member, an anchor and a hinge. The beam member having a length sufficient to overhang both the gate connection and the drain connection. The anchor coupling the switch structure to the substrate, the anchor having a width. The hinge coupling the beam member to the anchor at a respective position along the anchor's length, the hinge to flex in response to a charge differential established between the gate and the beam member. The switch structure having gaps between the substrate and the anchor in regions proximate to the hinges.
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