Invention Grant
US09230779B2 Methods and apparatus for correcting for non-uniformity in a plasma processing system
有权
用于校正等离子体处理系统中的不均匀性的方法和装置
- Patent Title: Methods and apparatus for correcting for non-uniformity in a plasma processing system
- Patent Title (中): 用于校正等离子体处理系统中的不均匀性的方法和装置
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Application No.: US13423279Application Date: 2012-03-19
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Publication No.: US09230779B2Publication Date: 2016-01-05
- Inventor: Sang Ki Nam , Rajinder Dhindsa
- Applicant: Sang Ki Nam , Rajinder Dhindsa
- Applicant Address: US CA Fremont
- Assignee: Lam Research Corporation
- Current Assignee: Lam Research Corporation
- Current Assignee Address: US CA Fremont
- Agency: Martine Penilla Group, LLC
- Main IPC: H01J37/32
- IPC: H01J37/32 ; C23C16/44 ; C23C16/455 ; C23C16/509 ; A23G3/26 ; B05B12/00 ; B05B13/04 ; H01L21/67

Abstract:
A plasma processing system having a plasma processing chamber comprising at least one of a chamber wall and a chamber liner is disclosed. The plasma processing system includes a plurality of ground straps disposed around a circumference of a chamber surface, the chamber surface being one of the chamber walls and the chamber liner of the plasma processing chamber. The plasma processing system further includes at least a first impedance device coupled to at least a first ground strap of the plurality of ground straps, wherein a second ground strap of the plurality of ground straps is not provided with a second impedance device having the same impedance value as the first impedance device.
Public/Granted literature
- US20130240145A1 METHODS AND APPARATUS FOR CORRECTING FOR NON-UNIFORMITY IN A PLASMA PROCESSING SYSTEM Public/Granted day:2013-09-19
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