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US09230779B2 Methods and apparatus for correcting for non-uniformity in a plasma processing system 有权
用于校正等离子体处理系统中的不均匀性的方法和装置

Methods and apparatus for correcting for non-uniformity in a plasma processing system
Abstract:
A plasma processing system having a plasma processing chamber comprising at least one of a chamber wall and a chamber liner is disclosed. The plasma processing system includes a plurality of ground straps disposed around a circumference of a chamber surface, the chamber surface being one of the chamber walls and the chamber liner of the plasma processing chamber. The plasma processing system further includes at least a first impedance device coupled to at least a first ground strap of the plurality of ground straps, wherein a second ground strap of the plurality of ground straps is not provided with a second impedance device having the same impedance value as the first impedance device.
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