Invention Grant
- Patent Title: Transistor(s) with different source/drain channel junction characteristics, and methods of fabrication
- Patent Title (中): 具有不同源/漏通道结特性的晶体管及其制造方法
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Application No.: US14282094Application Date: 2014-05-20
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Publication No.: US09230802B2Publication Date: 2016-01-05
- Inventor: Neeraj Tripathi , Christopher Michael Prindle
- Applicant: GLOBALFOUNDRIES Inc.
- Applicant Address: KY Grand Cayman
- Assignee: GLOBALFOUNDRIES INC.
- Current Assignee: GLOBALFOUNDRIES INC.
- Current Assignee Address: KY Grand Cayman
- Agency: Heslin Rothenberg Farley & Mesiti P.C.
- Agent Nicholas Mesiti, Esq.
- Main IPC: H01L21/30
- IPC: H01L21/30 ; H01L21/46 ; H01L21/02 ; H01L29/66 ; H01L29/78 ; H01L29/08

Abstract:
Field-effect transistors (FETs) and methods of fabricating field-effect transistors are provided, with one or both of a source cavity or a drain cavity having different channel junction characteristics. The methods include, for instance, recessing a semiconductor material to form a cavity adjacent to a channel region of the transistor, the recessing defining a bottom channel interface surface and a sidewall channel interface surface within the cavity; providing a protective liner over the sidewall channel interface surface, with the bottom channel interface surface being exposed within the cavity; processing the bottom channel interface surface to facilitate forming a first channel junction of the transistor; and removing the protective liner from over the sidewall channel interface surface, and subsequently processing the sidewall channel interface surface to form a second channel junction of the transistor, where the first and second channel junctions have different channel junction characteristics.
Public/Granted literature
- US20150340229A1 TRANSISTOR(S) WITH DIFFERENT SOURCE/DRAIN CHANNEL JUNCTION CHARACTERISTICS, AND METHODS OF FABRICATION Public/Granted day:2015-11-26
Information query
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