Invention Grant
US09230838B2 Apparatus for storage of objects from the field of manufacture of electronic components 有权
用于从电子部件的制造领域存储物体的装置

  • Patent Title: Apparatus for storage of objects from the field of manufacture of electronic components
  • Patent Title (中): 用于从电子部件的制造领域存储物体的装置
  • Application No.: US12375065
    Application Date: 2007-07-20
  • Publication No.: US09230838B2
    Publication Date: 2016-01-05
  • Inventor: Erich Jäger
  • Applicant: Erich JägerDoris Jäger
  • Applicant Address: CH Tägerwilen
  • Assignee: TEC-SEM AG
  • Current Assignee: TEC-SEM AG
  • Current Assignee Address: CH Tägerwilen
  • Agency: McGlew and Tuttle, P.C.
  • Priority: CH1238/06 20060726
  • International Application: PCT/CH2007/000361 WO 20070720
  • International Announcement: WO2008/011741 WO 20080131
  • Main IPC: H01L21/677
  • IPC: H01L21/677 H01L21/673
Apparatus for storage of objects from the field of manufacture of electronic components
Abstract:
A storage apparatus for objects in the manufacture of substrates, in particular of substrates for electronic components, is provided with a housing which forms at least one closed area for storage of the objects. The storage apparatus also has a pure air device by which a pure air atmosphere can be produced at least within a section of the housing. Using at least one input/output device for the storage apparatus, objects can be passed into the interior of the housing or removed from the interior, in which case the objects can be handled by at least one handling device in the interior of the housing, and object receptacles are provided within the housing, in which objects can be temporarily stored outside transport containers. In order to require a position area which is as small as possible for a storage apparatus such as this, despite it having a high storage capacity, the invention provides that two areas which are arranged at least partially one above the other are formed in the same housing of the storage apparatus, with a first area for an object storage device, and a second area for a transport container storage device.
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