Invention Grant
- Patent Title: Reticle pod having gas guiding apparatus
- Patent Title (中): 带有导气装置的标线盘
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Application No.: US13889498Application Date: 2013-05-08
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Publication No.: US09230839B2Publication Date: 2016-01-05
- Inventor: Pao-Yi Lu , Tien-Jui Lin
- Applicant: GUDENG PRECISION INDUSTRIAL CO., LTD.
- Applicant Address: TW New Taipei
- Assignee: Gudeng Precision Industrial Co., Ltd.
- Current Assignee: Gudeng Precision Industrial Co., Ltd.
- Current Assignee Address: TW New Taipei
- Agency: Rosenberg, Klein & Lee
- Priority: TW102110717A 20130326
- Main IPC: H01L21/673
- IPC: H01L21/673

Abstract:
The present invention relates to a reticle pod having gas guiding apparatus. The gas guiding apparatus communicates with at least an inlet of the reticle pod and comprises a first outlet corresponding to a first gas flowing space of the reticle pod and a second outlet corresponding to a second gas flowing space. When the inlet supplies a high-purity gas to the gas guiding apparatus, the high-purity gas will flows through the gas guiding apparatus, and flow to the first and second gas flowing spaces via the first and second outlets, respectively to distribute uniformly in the first and second gas flowing spaces. In addition, the cleaning efficiency on the reticle is improved; the contact between the reticle and air can be avoided for protecting the reticle. Thereby, the usage of the high-purity gas is reduced, and the filling efficiency of the high-purity gas is enhanced.
Public/Granted literature
- US20140291198A1 RETICLE POD HAVING GAS GUIDING APPARATUS Public/Granted day:2014-10-02
Information query
IPC分类: