Invention Grant
US09230845B2 Article storage facility and article storage method 有权
物品储存设备和物品储存方法

Article storage facility and article storage method
Abstract:
An article storage facility comprises a plurality of storage units for storing transporting containers for substrates and inactive gas feed passages for supplying inactive gas to each of the plurality of said storage units. The plurality of storage units are divided into a plurality of sections. The inactive gas feed passages include section feeding portions which supply the inactive gas to the sections, and storage unit feeding portions which divert and supply the inactive gas, that is supplied to a respective section by an associated one of the section feeding portions, to the plurality of storage units in the respective section. The article storage facility includes a bypass portion which allows communication between two or more storage unit feeding portions, and a bypass switching valve that can be switched between an open state in which the inactive gas can be communicated through the bypass portion and a closed state in which the inactive gas cannot be communicated through the bypass portion.
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