Invention Grant
- Patent Title: Semiconductor devices having bit line contact plugs and methods of manufacturing the same
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Application No.: US14685685Application Date: 2015-04-14
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Publication No.: US09230853B2Publication Date: 2016-01-05
- Inventor: Jae Seon Yu , Sang Rok Oh
- Applicant: SK hynix Inc.
- Applicant Address: KR Gyeonggi-do
- Assignee: SK Hynix Inc.
- Current Assignee: SK Hynix Inc.
- Current Assignee Address: KR Gyeonggi-do
- Agency: William Park & Associates Ltd.
- Priority: KR10-2012-0096287 20120831
- Main IPC: H01L21/768
- IPC: H01L21/768 ; H01L23/498 ; H01L27/02 ; H01L27/108

Abstract:
A semiconductor device including active regions defined in a semiconductor substrate to be non-parallel with a first direction and a second direction which are perpendicular to each other, word lines intersecting active regions and extending in first directions to be spaced apart from each other in the second direction, bit lines crossing over word lines and extending in second directions to be spaced apart from each other in the first direction, first impurity regions disposed in respective ones of central portions of active regions to non-overlap with the word lines, second impurity regions disposed in both ends of each of the active regions to non-overlap with the word lines, and bit line contact plugs disposed between the first impurity regions and the bit lines. The bit line contact plugs having longish shapes including major axes substantially parallel with the second direction and minor axes substantially parallel with the first direction.
Public/Granted literature
- US20150221548A1 SEMICONDUCTOR DEVICES HAVING BIT LINE CONTACT PLUGS AND METHODS OF MANUFACTURING THE SAME Public/Granted day:2015-08-06
Information query
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