Invention Grant
- Patent Title: Wafer back side coating as dicing tape adhesive
- Patent Title (中): 晶圆背面涂层作为切割胶带粘合剂
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Application No.: US13833634Application Date: 2013-03-15
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Publication No.: US09230888B2Publication Date: 2016-01-05
- Inventor: Gyanendra Dutt , Qizhuo Zhuo , Elizabeth Hoang , Stephen Ruatta
- Applicant: Henkel IP & Holding GmbH
- Applicant Address: DE Duesseldorf
- Assignee: Henkel IP & Holding GmbH
- Current Assignee: Henkel IP & Holding GmbH
- Current Assignee Address: DE Duesseldorf
- Agent James J. Cummings
- Main IPC: H01L21/00
- IPC: H01L21/00 ; H01L23/488 ; H01L21/683 ; H01L23/00

Abstract:
A semiconductor assembly comprises a semiconductor wafer, an adhesive coating disposed on the back side of the wafer, and a bare dicing tape, preferably UV radiation transparent. The assembly is prepared by the method comprising (a) providing a semiconductor wafer, (b) disposing a wafer back side coating on the semiconductor wafer, (c) partially curing the wafer back side coating to the extent that it adheres to the back side of the wafer and remains tacky, and (d) contacting the bare dicing tape to the partially cured and tacky wafer back side coating, optionally with heat and pressure.
Public/Granted literature
- US20140225283A1 WAFER BACK SIDE COATING AS DICING TAPE ADHESIVE Public/Granted day:2014-08-14
Information query
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