Invention Grant
- Patent Title: Self-healing crack stop structure
- Patent Title (中): 自愈裂缝结构
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Application No.: US14048838Application Date: 2013-10-08
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Publication No.: US09230921B2Publication Date: 2016-01-05
- Inventor: Stephen P. Ayotte , Alissa R. Cote , Kendra A. Lyons , John C. Malinowski , Benjamin J. Pierce
- Applicant: INTERNATIONAL BUSINESS MACHINES CORPORATION
- Applicant Address: KY Grand Cayman
- Assignee: GLOBALFOUNDRIES INC.
- Current Assignee: GLOBALFOUNDRIES INC.
- Current Assignee Address: KY Grand Cayman
- Agency: Roberts Mlotkowski Safran & Cole, P.C.
- Agent Anthony Canale; Andrew M. Calderon
- Main IPC: H01L23/00
- IPC: H01L23/00 ; H01L21/311 ; H01L21/3105 ; H01L21/02 ; H01L23/31
Abstract:
A self-healing crack stop structure and methods of manufacture are disclosed herein. The structure comprises a crack stop structure formed in one or more dielectric layers and surrounding an active region of an integrated circuit chip. The crack stop comprises self healing material which, upon propagation of a crack, is structured to seal the crack and prevent further propagation of the crack.
Public/Granted literature
- US20150097271A1 SELF-HEALING CRACK STOP STRUCTURE Public/Granted day:2015-04-09
Information query
IPC分类:
