Invention Grant
- Patent Title: Electronic chip with means of protecting its back face
- Patent Title (中): 电子芯片具有保护其背面的手段
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Application No.: US14510525Application Date: 2014-10-09
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Publication No.: US09230923B2Publication Date: 2016-01-05
- Inventor: Yann Lamy , Alain Merle , Guy-Michel Parat , Assia Tria
- Applicant: COMMISSARIAT A L'ENERGIE ATOMIQUE ET AUX ENE ALT
- Applicant Address: FR Paris
- Assignee: Commissariat à l'énergie atomique et aux énergies alternatives
- Current Assignee: Commissariat à l'énergie atomique et aux énergies alternatives
- Current Assignee Address: FR Paris
- Agency: Oblon, McClelland, Maier & Neustadt, L.L.P.
- Priority: FR1360292 20131022
- Main IPC: H01L23/00
- IPC: H01L23/00 ; H01L49/02 ; H01L21/768 ; G06F21/86 ; H01L29/66 ; H01L29/94 ; H01L27/02 ; H01L27/06 ; H01L23/522

Abstract:
An electronic chip is provided, including an electronic circuit located at a front face of a substrate; a capacitive element placed at a back face of the substrate and facing the electronic circuit, and electrically connected to the electronic circuit by a first electrical connection and a second electrical connection, the first electrical connection including at least a first electrically conducting via passing through the substrate, the electronic circuit being configured to measure a value of electrical capacitance of the capacitive element between the first and the second electrical connections; and a plurality of second vias or trenches passing through the back face of the substrate and a part of the thickness of the substrate, and extending toward the electronic circuit such that bottom walls of the plurality of second vias or trenches are separated from the electronic circuit by at least one non-zero distance.
Public/Granted literature
- US20150108606A1 ELECTRONIC CHIP WITH MEANS OF PROTECTING ITS BACK FACE Public/Granted day:2015-04-23
Information query
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