Invention Grant
- Patent Title: Method of making ultrahigh density vertical NAND memory device
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Application No.: US14587368Application Date: 2014-12-31
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Publication No.: US09230976B2Publication Date: 2016-01-05
- Inventor: Johann Alsmeier
- Applicant: SANDISK TECHNOLOGIES INC.
- Applicant Address: US TX Plano
- Assignee: SANDISK TECHNOLOGIES INC.
- Current Assignee: SANDISK TECHNOLOGIES INC.
- Current Assignee Address: US TX Plano
- Agency: The Marbury Law Group PLLC
- Main IPC: H01L21/336
- IPC: H01L21/336 ; H01L27/115 ; H01L29/66 ; H01L29/788 ; H01L29/792 ; H01L21/28 ; H01L29/49

Abstract:
Monolithic, three dimensional NAND strings include a semiconductor channel, at least one end portion of the semiconductor channel extending substantially perpendicular to a major surface of a substrate, a plurality of control gate electrodes having a strip shape extending substantially parallel to the major surface of the substrate, the blocking dielectric comprising a plurality of blocking dielectric segments, a plurality of discrete charge storage segments, and a tunnel dielectric located between each one of the plurality of the discrete charge storage segments and the semiconductor channel.
Public/Granted literature
- US20150171099A1 ULTRAHIGH DENSITY VERTICAL NAND MEMORY DEVICE AND METHOD OF MAKING THEREOF Public/Granted day:2015-06-18
Information query
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