Invention Grant
US09230990B2 Silicon-on-insulator integrated circuit devices with body contact structures 有权
具有体接触结构的绝缘体上硅集成电路器件

Silicon-on-insulator integrated circuit devices with body contact structures
Abstract:
Silicon-on-insulator integrated circuits including body contact structures and methods for fabricating the same are disclosed. A method for fabricating a silicon-on-insulator integrated circuit includes filling a plurality of first and second shallow isolation trenches with an insulating material to form plurality of first and second shallow trench isolation (STI) structures, and forming a gate structure over the semiconductor layer that includes a first portion disposed over and parallel to at least two of the plurality of second STI structures and a second portion disposed in between the at least two of the plurality of second STI structures. The method further includes forming contact plugs to a body contact region of the semiconductor layer. The body contact region comprises a portion of the semiconductor layer between at least one of the plurality of first STI structures and at least one of the plurality of second STI structures.
Information query
Patent Agency Ranking
0/0