Invention Grant
US09230990B2 Silicon-on-insulator integrated circuit devices with body contact structures
有权
具有体接触结构的绝缘体上硅集成电路器件
- Patent Title: Silicon-on-insulator integrated circuit devices with body contact structures
- Patent Title (中): 具有体接触结构的绝缘体上硅集成电路器件
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Application No.: US14253629Application Date: 2014-04-15
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Publication No.: US09230990B2Publication Date: 2016-01-05
- Inventor: Shaoqiang Zhang , Guan Huei See , Purakh Raj Verma
- Applicant: GLOBALFOUNDRIES Singapore Pte. Ltd.
- Applicant Address: SG Singapore
- Assignee: GLOBALFOUNDRIES SINGAPORE PTE. LTD.
- Current Assignee: GLOBALFOUNDRIES SINGAPORE PTE. LTD.
- Current Assignee Address: SG Singapore
- Agency: Ingrassia Fisher & Lorenz, P.C.
- Main IPC: H01L27/01
- IPC: H01L27/01 ; H01L27/12 ; H01L29/00 ; H01L21/768 ; H01L29/10 ; H01L29/66 ; H01L29/78 ; H01L29/786

Abstract:
Silicon-on-insulator integrated circuits including body contact structures and methods for fabricating the same are disclosed. A method for fabricating a silicon-on-insulator integrated circuit includes filling a plurality of first and second shallow isolation trenches with an insulating material to form plurality of first and second shallow trench isolation (STI) structures, and forming a gate structure over the semiconductor layer that includes a first portion disposed over and parallel to at least two of the plurality of second STI structures and a second portion disposed in between the at least two of the plurality of second STI structures. The method further includes forming contact plugs to a body contact region of the semiconductor layer. The body contact region comprises a portion of the semiconductor layer between at least one of the plurality of first STI structures and at least one of the plurality of second STI structures.
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