Invention Grant
- Patent Title: Transistor using single crystal silicon nanowire and method for manufacturing same
- Patent Title (中): 使用单晶硅纳米线的晶体管及其制造方法
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Application No.: US14370212Application Date: 2012-01-04
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Publication No.: US09231052B2Publication Date: 2016-01-05
- Inventor: Sangsig Kim , Myeong-Won Lee , Youngin Jeon
- Applicant: Sangsig Kim , Myeong-Won Lee , Youngin Jeon
- Applicant Address: KR Seoul
- Assignee: KOREA UNIVERSITY RESEARCH AND BUSINESS FOUNDATION
- Current Assignee: KOREA UNIVERSITY RESEARCH AND BUSINESS FOUNDATION
- Current Assignee Address: KR Seoul
- Agency: Kile Park Reed & Houtteman PLLC
- Priority: KR10-2012-0000341 20120103
- International Application: PCT/KR2012/000079 WO 20120104
- International Announcement: WO2013/103163 WO 20130711
- Main IPC: H01L29/06
- IPC: H01L29/06 ; H01L21/82 ; H01L27/12 ; H01L29/423 ; H01L29/786 ; H01L21/02 ; H01L21/306 ; H01L29/10 ; H01L29/51 ; H01L29/66 ; B82Y10/00 ; B82Y40/00 ; H01L29/775 ; H01L29/16

Abstract:
A transistor using a single crystal silicon nanowire and a method for fabricating the transistor is disclosed. The transistor using a single crystal silicon nanowire comprises a substrate and a single crystal silicon nanowire formed on the substrate. Here, the single crystal silicon nanowire comprises a source region and a drain region formed longitudinally with the single crystal silicon nanowire and separate from each other, and a channel region located between the source region and the drain region, wherein the perpendicular thickness of the channel region to the longitudinal direction is thinner than the thickness of the source region and the drain region.
Public/Granted literature
- US20140353591A1 TRANSISTOR USING SINGLE CRYSTAL SILICON NANOWIRE AND METHOD FOR MANUFACTURING SAME Public/Granted day:2014-12-04
Information query
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