Invention Grant
US09231084B2 Method of forming laterally diffused metal oxide semiconductor transistor with partially unsilicided source/drain
有权
形成具有部分无硅源极/漏极的横向扩散的金属氧化物半导体晶体管的方法
- Patent Title: Method of forming laterally diffused metal oxide semiconductor transistor with partially unsilicided source/drain
- Patent Title (中): 形成具有部分无硅源极/漏极的横向扩散的金属氧化物半导体晶体管的方法
-
Application No.: US14615058Application Date: 2015-02-05
-
Publication No.: US09231084B2Publication Date: 2016-01-05
- Inventor: Harry-Hak-Lay Chuang , Lee-Wee Teo , Ming Zhu
- Applicant: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD.
- Applicant Address: TW
- Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD.
- Current Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD.
- Current Assignee Address: TW
- Agency: Hauptman Ham, LLP
- Main IPC: H01L21/336
- IPC: H01L21/336 ; H01L29/66 ; H01L29/417 ; H01L29/78 ; H01L29/08 ; H01L21/28 ; H01L29/51

Abstract:
A method of forming a semiconductor device comprises forming a gate over a substrate. The method also comprises forming a source and a drain on opposite sides of the gate. The source and the drain are formed such that the source and the drain are separated by a channel region beneath the gate. The source and the drain are positioned such that the channel region has a channel width with respect to a surface of the substrate greater than a width of the gate with respect to the surface of the substrate. The method further comprises forming a first silicide over a portion of the source. The method additionally comprises forming a second silicide over a portion of the drain such that the drain has an unsilicided region adjacent to the gate configured to provide a resistive region configured to sustain a voltage load in a high voltage laterally diffused metal oxide semiconductor (LDMOS) application.
Public/Granted literature
Information query
IPC分类: