Invention Grant
US09231159B2 Method of manufacturing nitride semiconductor light emitting element having thick metal bump
有权
制造具有厚金属凸块的氮化物半导体发光元件的方法
- Patent Title: Method of manufacturing nitride semiconductor light emitting element having thick metal bump
- Patent Title (中): 制造具有厚金属凸块的氮化物半导体发光元件的方法
-
Application No.: US13457307Application Date: 2012-04-26
-
Publication No.: US09231159B2Publication Date: 2016-01-05
- Inventor: Akinori Yoneda , Hirofumi Kawaguchi , Kouichiroh Deguchi
- Applicant: Akinori Yoneda , Hirofumi Kawaguchi , Kouichiroh Deguchi
- Applicant Address: JP Anan-Shi
- Assignee: NICHIA CORPORATION
- Current Assignee: NICHIA CORPORATION
- Current Assignee Address: JP Anan-Shi
- Agency: Foley & Lardner LLP
- Priority: JP2011-098851 20110427; JP2011-110838 20110517
- Main IPC: H01L33/00
- IPC: H01L33/00 ; H01L33/38 ; H01L33/44 ; H01L33/40

Abstract:
A method of manufacturing a flip-chip nitride semiconductor light emitting element includes steps of providing a nitride semiconductor light emitting element structure; forming an insulating protective layer on the nitride semiconductor light emitting element structure; forming a resist pattern having openings above an n-side electrode connecting surface and a p-side electrode connecting surface; etching the protective layer to expose the n-side electrode connecting surface and the p-side electrode connecting surface using the resist pattern as a mask; forming a first metal layer that becomes an n-side electrode and a p-side electrode, the first metal layer being formed as a continuous layer disposed on the n-side electrode connecting surface, the p-side electrode connecting surface and the resist pattern; forming a second metal layer that becomes metal bumps by electrolytic plating using the first metal layer as an electrode for the electrolytic plating; and removing the resist pattern.
Public/Granted literature
- US20120273823A1 NITRIDE SEMICONDUCTOR LIGHT EMITTING ELEMENT AND METHOD OF MANUFACTURING THE SAME Public/Granted day:2012-11-01
Information query
IPC分类: