Invention Grant
- Patent Title: Angular velocity sensor
- Patent Title (中): 角速度传感器
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Application No.: US14718645Application Date: 2015-05-21
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Publication No.: US09231182B2Publication Date: 2016-01-05
- Inventor: Hirofumi Natori , Kenichi Tochi , Akihiro Unno , Takashi Aoyagi
- Applicant: TDK CORPORATION
- Applicant Address: JP Tokyo
- Assignee: TDK CORPORATION
- Current Assignee: TDK CORPORATION
- Current Assignee Address: JP Tokyo
- Agency: Oliff PLC
- Priority: JP2014-108191 20140526
- Main IPC: H01L41/047
- IPC: H01L41/047 ; G01C19/5607

Abstract:
In a piezoelectric element, a piezoelectric film, a first electrode film provided on one surface of the piezoelectric film, and a second electrode film provided on the other surface of the piezoelectric film form a layered structure, an outer contour of the first electrode film and an outer contour of the second electrode film are positioned outside an outer contour of the piezoelectric film as viewed in a layering direction, an organic resin film is in contact with the piezoelectric film, and generation of noise is suppressed.
Public/Granted literature
- US20150340588A1 ANGULAR VELOCITY SENSOR Public/Granted day:2015-11-26
Information query
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