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US09231198B2 Resistance-variable memory device including carbide-based solid electrolyte membrane and manufacturing method thereof 有权
包括碳化物类固体电解质膜的电阻变化记忆装置及其制造方法

Resistance-variable memory device including carbide-based solid electrolyte membrane and manufacturing method thereof
Abstract:
Disclosed are a resistance-variable memory device including a carbide-based solid electrolyte membrane that has stable memory at a high temperature and a manufacturing method thereof. The resistance-variable memory device includes: a lower electrode, the carbide-based solid electrolyte membrane arranged on the lower electrode, and an upper electrode arranged on the solid electrolyte membrane. In addition, the method for manufacturing the resistance-variable memory device comprises: a step for forming the lower electrode on a substrate, a step for forming the carbide-based solid electrolyte membrane on the lower electrode, and a step for forming the upper electrode on the solid electrolyte membrane.
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