Invention Grant
US09231377B2 Vertical cavity surface emitting laser and atomic oscillator 有权
垂直腔表面发射激光和原子振荡器

Vertical cavity surface emitting laser and atomic oscillator
Abstract:
A vertical cavity surface emitting laser includes: a substrate; and a laminated body which is provided over the substrate, wherein the laminated body includes a first mirror layer, an active layer, and a second mirror layer, in a plan view, the laminated body includes a first distortion imparting portion, a second distortion imparting portion, and a resonance portion which is provided between the first distortion imparting portion and the second distortion imparting portion and resonates light generated by the active layer, and an angle formed by a side surface of the first distortion imparting portion and an upper surface of the substrate, and an angle formed by a side surface of the second distortion imparting portion and the upper surface of the substrate are greater than an angle formed by a side surface of the resonance portion and the upper surface of the substrate.
Public/Granted literature
Information query
Patent Agency Ranking
0/0