Invention Grant
US09231584B2 Device and method for micro-electro-mechanical-system photonic switch 有权
微电子机械系统光子开关的装置和方法

Device and method for micro-electro-mechanical-system photonic switch
Abstract:
In one embodiment, a micro-electro-mechanical-system (MEMS) photonic switch includes a first plurality of collimators and a first mirror array optically coupled to the first plurality of collimators. The first mirror array includes a first plurality of first MEMS mirrors integrated on a first substrate and a first plurality of first photodiodes integrated on the first substrate, where the photodiodes are disposed in interstitial spaces between the MEMS mirrors.
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