Invention Grant
US09231584B2 Device and method for micro-electro-mechanical-system photonic switch
有权
微电子机械系统光子开关的装置和方法
- Patent Title: Device and method for micro-electro-mechanical-system photonic switch
- Patent Title (中): 微电子机械系统光子开关的装置和方法
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Application No.: US13964437Application Date: 2013-08-12
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Publication No.: US09231584B2Publication Date: 2016-01-05
- Inventor: Alan Frank Graves , Dominic Goodwill
- Applicant: Huawei Technologies Co., Ltd.
- Applicant Address: CN Shenzhen
- Assignee: Huawei Technologies Co., LTD.
- Current Assignee: Huawei Technologies Co., LTD.
- Current Assignee Address: CN Shenzhen
- Agency: Slater & Matsil, L.L.P.
- Main IPC: G02B6/26
- IPC: G02B6/26 ; H03K17/78 ; G02B6/35 ; G02B27/62 ; G02B26/08 ; H01H1/00

Abstract:
In one embodiment, a micro-electro-mechanical-system (MEMS) photonic switch includes a first plurality of collimators and a first mirror array optically coupled to the first plurality of collimators. The first mirror array includes a first plurality of first MEMS mirrors integrated on a first substrate and a first plurality of first photodiodes integrated on the first substrate, where the photodiodes are disposed in interstitial spaces between the MEMS mirrors.
Public/Granted literature
- US20150041629A1 Device and Method for Micro-Electro-Mechanical-System Photonic Switch Public/Granted day:2015-02-12
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