Invention Grant
- Patent Title: Imaging device and method for high-sensitivity optical scanning and integrated circuit therefor
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Application No.: US13966672Application Date: 2013-08-14
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Publication No.: US09232114B2Publication Date: 2016-01-05
- Inventor: Yigal Katzir , Itay Gur-Arie , Yacov Malinovich
- Applicant: Orbotech Ltd.
- Applicant Address: IL Yavne
- Assignee: Orbotech Ltd.
- Current Assignee: Orbotech Ltd.
- Current Assignee Address: IL Yavne
- Agency: Sughrue Mion, PLLC
- Main IPC: H04N3/14
- IPC: H04N3/14 ; G01N21/88 ; G01N21/89 ; G01N21/956 ; H01L27/146 ; H04N5/374
Abstract:
An inspection system includes a CMOS integrated circuit having integrally formed thereon an at least two dimensional array of photosensors and providing an inspection output representing an object to be inspected. A defect analyzer is operative to receive the inspection output and to provide a defect report.
Public/Granted literature
- US20130329103A1 IMAGING DEVICE AND METHOD FOR HIGH-SENSITIVITY OPTICAL SCANNING AND INTEGRATED CIRCUIT THEREFOR Public/Granted day:2013-12-12
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