Invention Grant
US09232652B2 Manufacturing method of substrate, manufacturing method of wiring substrate, glass substrate and wiring substrate 有权
基板的制造方法,布线基板,玻璃基板和配线基板的制造方法

Manufacturing method of substrate, manufacturing method of wiring substrate, glass substrate and wiring substrate
Abstract:
There is provided that a substrate comprising a glass substrate 2 constituted by a glass including a silicon oxide. The glass substrate has a through-hole 3 communicating with a front surface and a rear surface of the glass substrate, and filled with a metal material. The substrate is realized by forming an anchor part by selectively etching a silicon oxide on a sidewall surrounding an inside of said through-hole 3 before filling the metal material and by filling the inside of said through-hole 3 with the metal material after forming the anchor part.
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