Invention Grant
US09243218B2 Dynamic multipurpose composition for the removal of photoresists and method for its use 有权
用于去除光致抗蚀剂的动态多功能组合物及其使用方法

Dynamic multipurpose composition for the removal of photoresists and method for its use
Abstract:
Methods for using improved stripper solutions having dimethyl sulfoxide; a quaternary ammonium hydroxide; an alkanolamine having at least two carbon atoms, at least one amino substituent and at least one hydroxyl substituent, with the amino and hydroxyl substituents being attached to two different carbon atoms; and a surfactant. Some formulation can additionally contain a secondary solvent. The stripper solutions are effective for removing photoresists from substrates, and typically have freezing points below about +15° C. and high loading capacities.
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