Invention Grant
US09243339B2 Additives for producing copper electrodeposits having low oxygen content 有权
用于生产氧含量低的铜电沉积物的添加剂

Additives for producing copper electrodeposits having low oxygen content
Abstract:
A copper electroplating bath for producing copper electrodeposits is described. The copper electroplating bath comprises (a) a soluble copper salt, (b) an electrolyte comprising one or more acids, and (c) a grain refining additive comprising an alkyl, aryl or alkylaryl diamine. The copper electroplating bath can be used for producing electroformed copper deposits having low oxygen content.
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