Invention Grant
US09243343B2 Vitreous silica crucible 有权
石英玻璃坩埚

Vitreous silica crucible
Abstract:
The present invention provides a vitreous silica crucible which can restrain deterioration of crystallinity of a silicon ingot in multi-pulling. Provided is a vitreous silica crucible for pulling a silicon single crystal, the crucible has a wall having, from an inner surface toward an outer surface of the crucible, a synthetic vitreous silica layer, a natural vitreous silica layer, an impurity-containing vitreous silica layer and a natural vitreous silica layer.
Public/Granted literature
Information query
Patent Agency Ranking
0/0