Invention Grant
US09243619B2 Liquid feed pump and circulation pump with detection units to detect operating states of the pumps 有权
液体进料泵和循环泵,带有检测单元,用于检测泵的运行状态

Liquid feed pump and circulation pump with detection units to detect operating states of the pumps
Abstract:
A pump chamber is connected to an outlet-side buffer chamber via an outlet channel, and pumps a liquid from the outlet-side buffer chamber. A pressure vibration generated within the pump chamber when the volume of the pump chamber is decreased includes various kinds of information relating to the operating states of the liquid feed pump, such as mixing of bubbles, pumping pressure, dissolved gas amount, and liquid feed amount. Thus, it is possible to detect the pressure vibration, thereby simply and easily detecting the various kinds of information relating to the operating states of the liquid feed pump.
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