Invention Grant
- Patent Title: Rules for reducing the sensitivity of fringe projection autofocus to air temperature changes
- Patent Title (中): 降低边缘投影自动对焦对气温变化的敏感度的规则
-
Application No.: US13801961Application Date: 2013-03-13
-
Publication No.: US09243901B2Publication Date: 2016-01-26
- Inventor: Eric Peter Goodwin , Daniel G. Smith
- Applicant: Nikon Corporation
- Applicant Address: JP Tokyo
- Assignee: Nikon Corporation
- Current Assignee: Nikon Corporation
- Current Assignee Address: JP Tokyo
- Agency: Klarquist Sparkman, LLP
- Main IPC: G03B27/54
- IPC: G03B27/54 ; G03B27/34 ; G01B11/25 ; G02B27/42 ; G03F9/00

Abstract:
Fringe projection autofocus systems are provided with variable pitch diffraction gratings or multiple diffraction gratings so that a reference beam and a measurement beam propagate along a common path. Alternatively, an input beam can be directed to a diffraction grating so that the selected diffraction orders propagate along a common path. In some examples, distinct spectral bands are used for reference and measurement beams.
Public/Granted literature
- US20140049761A1 DESIGN RULES FOR REDUCING THE SENSITIVITY OF FRINGE PROJECTION AUTOFOCUS TO AIR TEMPERATURE CHANGES Public/Granted day:2014-02-20
Information query