Invention Grant
- Patent Title: Gyro sensor and electronic apparatus
- Patent Title (中): 陀螺传感器和电子仪器
-
Application No.: US13854269Application Date: 2013-04-01
-
Publication No.: US09243908B2Publication Date: 2016-01-26
- Inventor: Kei Kanemoto
- Applicant: Seiko Epson Corporation
- Applicant Address: JP
- Assignee: Seiko Epson Corporation
- Current Assignee: Seiko Epson Corporation
- Current Assignee Address: JP
- Agency: Harness, Dickey & Pierce, P.L.C.
- Priority: JP2012-083974 20120402
- Main IPC: G01C19/56
- IPC: G01C19/56 ; G01C19/5747 ; G01C19/5769

Abstract:
A gyro sensor includes: a vibrating body; a first fixed drive electrode that is disposed, in plan view, on a first direction side crossing a driving vibration direction of the vibrating body and vibrates the vibrating body; a second fixed drive electrode that is disposed, in plan view, on the side opposite to the first direction side and vibrates the vibrating body; a fixed detection electrode that detects a signal changing according to angular velocity of the vibrating body; a first drive wiring that is connected with the first fixed drive electrode and extends toward one side in the driving vibration direction; a second drive wiring that is connected with the second fixed drive electrode and extends toward the one side in the driving vibration direction; and a detection wiring that is connected with the fixed detection electrode and extends toward the side opposite to the one side.
Public/Granted literature
- US20130255378A1 GYRO SENSOR AND ELECTRONIC APPARATUS Public/Granted day:2013-10-03
Information query