Invention Grant
- Patent Title: Micro-electro-mechanical sensing device and manufacturing method thereof
- Patent Title (中): 微机电传感装置及其制造方法
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Application No.: US13688099Application Date: 2012-11-28
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Publication No.: US09244093B2Publication Date: 2016-01-26
- Inventor: Chih-Ming Sun , Ming-Han Tsai
- Applicant: Chih-Ming Sun , Ming-Han Tsai
- Applicant Address: TW Hsin-Chu
- Assignee: PIXART IMAGING INCORPORATION, R.O.C.
- Current Assignee: PIXART IMAGING INCORPORATION, R.O.C.
- Current Assignee Address: TW Hsin-Chu
- Agency: Tung & Associates
- Priority: TW100146103A 20111214
- Main IPC: G01P15/08
- IPC: G01P15/08 ; G01P15/09 ; G01P15/00 ; B81C1/00 ; G01P15/125

Abstract:
A micro-electro-mechanical sensing device including a substrate, a semiconductor layer, a supporting pillar, a first suspended arm, a connecting member, a second suspended arm, and a proof mass is provided. The semiconductor layer is disposed on or above the substrate. The supporting pillar is disposed on or above the semiconductor layer. The first suspended arm is disposed on the supporting pillar. The supporting connects a portion of the first suspended arm. The connecting member directly or indirectly connects another portion of the first suspended arm. The second suspended arm has a first surface and a second surface opposite to the first surface. The connecting member connects a portion of the first surface. The proof mass connects the second suspended arm and it includes a portion of the second suspended arm as a portion of the proof mass. A method for manufacturing the device is also provided.
Public/Granted literature
- US20130152688A1 MICRO-ELECTRO-MECHANICAL SENSING DEVICE AND MANUFACTURING METHOD THEREOF Public/Granted day:2013-06-20
Information query
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