Invention Grant
- Patent Title: Systems and method for laser voltage imaging state mapping
- Patent Title (中): 激光电压成像状态映射的系统和方法
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Application No.: US14307417Application Date: 2014-06-17
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Publication No.: US09244121B2Publication Date: 2016-01-26
- Inventor: Yin Shyang Ng , Dmitry Skvortsov
- Applicant: DCG SYSTEMS, INC.
- Applicant Address: US CA Fremont
- Assignee: DCG SYSTEMS, INC.
- Current Assignee: DCG SYSTEMS, INC.
- Current Assignee Address: US CA Fremont
- Agency: Nixon Peabody LLP
- Agent Joseph Bach, Esq.
- Main IPC: G01R31/308
- IPC: G01R31/308 ; G01R31/311

Abstract:
An apparatus and method for laser probing of a DUT is disclosed. The system enables laser voltage imaging state mapping of devices within the DUT. A selected area of the DUT is illuminating a while the DUT is receiving test signals causing certain of the active devices to modulate. Light reflected from the DUT is collected and is converted into an electrical signal. Phase information is extracting from the electrical signal and a two-dimensional image is generated from the phase information, wherein the two-dimensional image spatially correlates to the selected area.
Public/Granted literature
- US20140292363A1 SYSTEMS AND METHOD FOR LASER VOLTAGE IMAGING STATE MAPPING Public/Granted day:2014-10-02
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