Invention Grant
US09244342B2 Imprint apparatus and pattern transfer method 有权
印刷装置和图案转印方法

Imprint apparatus and pattern transfer method
Abstract:
An imprint apparatus comprises a scope which observes a mark formed in each shot of a substrate and a mark formed on a mold and a controller. The controller performs observation by the scope, detects an amount of displacement of the shot with respect to the mold based on the observation result, and, if the detected displacement amount falls outside an allowable range, executes at least one of remeasuring a baseline amount and reexecuting a global alignment process.
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