Invention Grant
- Patent Title: Imprint apparatus and pattern transfer method
- Patent Title (中): 印刷装置和图案转印方法
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Application No.: US12963009Application Date: 2010-12-08
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Publication No.: US09244342B2Publication Date: 2016-01-26
- Inventor: Hiroshi Sato
- Applicant: Hiroshi Sato
- Applicant Address: JP Tokyo
- Assignee: CANON KABUSHIKI KAISHA
- Current Assignee: CANON KABUSHIKI KAISHA
- Current Assignee Address: JP Tokyo
- Agency: Rossi, Kimms & McDowell LLP
- Priority: JP2009-286964 20091217; JP2010-260368 20101122
- Main IPC: B29C59/02
- IPC: B29C59/02 ; G03F7/00 ; B82Y10/00 ; B82Y40/00

Abstract:
An imprint apparatus comprises a scope which observes a mark formed in each shot of a substrate and a mark formed on a mold and a controller. The controller performs observation by the scope, detects an amount of displacement of the shot with respect to the mold based on the observation result, and, if the detected displacement amount falls outside an allowable range, executes at least one of remeasuring a baseline amount and reexecuting a global alignment process.
Public/Granted literature
- US20110147970A1 IMPRINT APPARATUS AND PATTERN TRANSFER METHOD Public/Granted day:2011-06-23
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