Invention Grant
- Patent Title: Method for producing thick film photoresist pattern
- Patent Title (中): 厚膜光致抗蚀剂图案的制造方法
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Application No.: US13708081Application Date: 2012-12-07
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Publication No.: US09244354B2Publication Date: 2016-01-26
- Inventor: Yasushi Washio , Tomoyuki Ando , Eiichi Shimura , Toshiaki Tachi
- Applicant: Tokyo Ohka Kogyo Co., Ltd.
- Applicant Address: JP Kawasaki-Shi
- Assignee: TOKYO OHKA KOGYO CO., LTD.
- Current Assignee: TOKYO OHKA KOGYO CO., LTD.
- Current Assignee Address: JP Kawasaki-Shi
- Agency: Knobbe Martens Olson & Bear LLP
- Priority: JP2011-276382 20111216
- Main IPC: G03F7/20
- IPC: G03F7/20 ; G03F7/004

Abstract:
A method for producing a thick film photoresist pattern including laminating a thick photoresist layer including a chemically amplified positive-type photoresist composition for thick film on a support; irradiating the thick photoresist layer; and developing the thick photoresist layer to obtain a thick film resist pattern; in which the composition includes an acid generator, a resin whose alkali solubility increases by the action of an acid, and an organic solvent having a boiling point of at least 150° C. and a contact angle on a silicon substrate of no greater than 18°, in an amount of at least 40% by mass with respect to total mass of the organic solvent.
Public/Granted literature
- US20130171572A1 METHOD FOR PRODUCING THICK FILM PHOTORESIST PATTERN Public/Granted day:2013-07-04
Information query
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