Invention Grant
- Patent Title: Apparatus and methods for generating electromagnetic radiation
- Patent Title (中): 用于产生电磁辐射的装置和方法
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Application No.: US14379470Application Date: 2012-02-24
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Publication No.: US09245730B2Publication Date: 2016-01-26
- Inventor: Amar B. Kamdar , David Malcolm Camm , Mladen Bumbulovic , Peter Lembesis
- Applicant: Amar B. Kamdar , David Malcolm Camm , Mladen Bumbulovic , Peter Lembesis
- Applicant Address: US CA Fremont
- Assignee: Mattson Technology, Inc.
- Current Assignee: Mattson Technology, Inc.
- Current Assignee Address: US CA Fremont
- Agency: Knobbe, Martens, Olson & Bear, LLP
- International Application: PCT/CA2012/000176 WO 20120224
- International Announcement: WO2013/142942 WO 20131003
- Main IPC: H01J1/02
- IPC: H01J1/02 ; H01J61/10 ; H01J61/52 ; H01J61/84

Abstract:
An apparatus for generating electromagnetic radiation includes an envelope, a vortex generator configured to generate a vortexing flow of liquid along an inside surface of the envelope, first and second electrodes within the envelope configured to generate a plasma arc therebetween, and an insulative housing associated surrounding at least a portion of an electrical connection to one of the electrodes. The apparatus further includes a shielding system configured to block electromagnetic radiation emitted by the arc to prevent the electromagnetic radiation from striking all inner surfaces of the insulative housing. The apparatus further includes a cooling system configured to cool the shielding system.
Public/Granted literature
- US20150035436A1 APPARATUS AND METHODS FOR GENERATING ELECTROMAGNETIC RADIATION Public/Granted day:2015-02-05
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