Invention Grant
- Patent Title: Electrical and opto-electrical characterization of large-area semiconductor devices
- Patent Title (中): 大面积半导体器件的电气和光电特性
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Application No.: US13266948Application Date: 2010-04-27
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Publication No.: US09245810B2Publication Date: 2016-01-26
- Inventor: Phillip Dale , Susanne Siebentritt
- Applicant: Phillip Dale , Susanne Siebentritt
- Applicant Address: DE Luxembourg JP Tokyo
- Assignee: UNIVERSITE DU LUXEMBOURG,TDK CORPORATION
- Current Assignee: UNIVERSITE DU LUXEMBOURG,TDK CORPORATION
- Current Assignee Address: DE Luxembourg JP Tokyo
- Agency: Foley & Lardner LLP
- Priority: LU91561 20090430
- International Application: PCT/EP2010/055657 WO 20100427
- International Announcement: WO2010/125078 WO 20101104
- Main IPC: G01R31/02
- IPC: G01R31/02 ; H01L21/66

Abstract:
The present invention relates to an electrical and/or opto-electrical characterisation method for testing large-area semiconductor devices in production, the method comprising the steps of providing a first electrode and placing it into electrical contact with a contact area of a conducting layer of a semiconductor device; providing a movable electrode assembly, comprising a container holding an electrolyte solution and at least a second electrode; immersing the second electrode into the electrolyte solution; positioning the electrode assembly such that the electrolyte solution places the second electrode into electrical contact with a top surface of the semiconductor device; and scanning the movable electrode assembly relative to the top surface of the semiconductor device while performing electrical measurements. It also relates to a corresponding electrical and/or opto-electrical characterisation device comprising a first electrode, a movable electrode assembly with a container holding an electrolyte solution and a second electrode immersed into it and scanning means.
Public/Granted literature
- US20120139551A1 Electrical and opto-electrical characterization of large-area semiconductor devices Public/Granted day:2012-06-07
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