Invention Grant
- Patent Title: Method of making a FinFET device
- Patent Title (中): 制造FinFET器件的方法
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Application No.: US14502550Application Date: 2014-09-30
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Publication No.: US09245883B1Publication Date: 2016-01-26
- Inventor: Chih-Han Lin , Jr-Jung Lin , Ming-Ching Chang , Chao-Cheng Chen
- Applicant: Taiwan Semiconductor Manufacturing Company, Ltd.
- Applicant Address: TW Hsin-Chu
- Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.
- Current Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.
- Current Assignee Address: TW Hsin-Chu
- Agency: Haynes and Boone, LLP
- Main IPC: H01L21/311
- IPC: H01L21/311 ; H01L27/088 ; H01L29/06 ; H01L21/8234 ; H01L21/762 ; H01L21/3213 ; H01L29/66 ; H01L21/3105

Abstract:
A method of fabricating a fin-like field-effect transistor (FinFET) device is disclosed. The method includes forming a first gate stack and a second gate stack over different portions of a fin feature formed on a substrate, forming a first dielectric layer in a space between the first and second gat stacks, removing the first gate stack to form a first gate trench, therefore the first gate trench exposes a portion of the fin feature. The method also includes removing the exposed portion of the fin feature and forming an isolation feature in the first gate trench.
Public/Granted literature
- US2605159A Triangular television and radio cabinet Public/Granted day:1952-07-29
Information query
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