Invention Grant
- Patent Title: Flash memory device and related manufacturing method
- Patent Title (中): 闪存设备及相关制造方法
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Application No.: US14494456Application Date: 2014-09-23
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Publication No.: US09245897B2Publication Date: 2016-01-26
- Inventor: Huilin Ma , Liqun Zhang , Hokmin Ho
- Applicant: Semiconductor Manufacturing International (Shanghai) Corporation
- Applicant Address: CN
- Assignee: SEMICONDUCTOR MANUFACTURING INTERNATIONAL (SHANGHAI) CORPORATION
- Current Assignee: SEMICONDUCTOR MANUFACTURING INTERNATIONAL (SHANGHAI) CORPORATION
- Current Assignee Address: CN
- Agency: Innovation Counsel LLP
- Priority: CN201410101129 20140319
- Main IPC: H01L21/336
- IPC: H01L21/336 ; H01L27/115

Abstract:
A method for manufacturing a memory device may include obtaining a substrate structure that includes a substrate, an oxide material layer positioned on the substrate, a polysilicon material layer positioned on the oxide material layer, a first control gate and a second control gate positioned on the polysilicon material layer, and an offset oxide layer positioned between the first control gate and the second control gate. The method may further include the following steps: removing, using the offset oxide layer as a first mask, a portion of the polysilicon material layer for forming a polysilicon structure that includes a first step structure; forming a masking oxide layer on the offset oxide layer; removing, using the masking oxide layer as a second mask, a portion of the polysilicon structure for forming a floating gate polysilicon member that includes the first step structure and a second step structure.
Public/Granted literature
- US20150270273A1 FLASH MEMORY DEVICE AND RELATED MANUFACTURING METHOD Public/Granted day:2015-09-24
Information query
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