Invention Grant
- Patent Title: Corrosion resistant electrodes for laser chambers
- Patent Title (中): 用于激光室的耐腐蚀电极
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Application No.: US13840736Application Date: 2013-03-15
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Publication No.: US09246298B2Publication Date: 2016-01-26
- Inventor: Janine Kardokus , Thomas P. Duffey , William N. Partlo
- Applicant: Cymer, LLC
- Applicant Address: US CA San Diego
- Assignee: Cymer, LLC
- Current Assignee: Cymer, LLC
- Current Assignee Address: US CA San Diego
- Agency: Martine Penilla Group, LLP
- Main IPC: H01S3/038
- IPC: H01S3/038 ; H01S3/0971 ; H01S3/225

Abstract:
Corrosion resistant electrodes are formed of brass that has been doped with phosphorus. The electrodes are formed of brass that contains about 100 ppm to about 1,000 ppm of phosphorus, and the brass has no visible microporosity at a magnification of 400×. The brass may be cartridge brass that contains about 30 weight percent of zinc and the balance copper. Corrosion resistant electrodes also may be formed by subjecting brass to severe plastic deformation to increase the resistance of the brass to plasma corrosion. The corrosion resistant electrodes can be used in laser systems to generate laser light.
Public/Granted literature
- US20130329763A1 CORROSION RESISTANT ELECTRODES FOR LASER CHAMBERS Public/Granted day:2013-12-12
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