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US09246622B2 Semiconductor optical element, optical module and method of manufacturing semiconductor optical element 有权
半导体光学元件,光学模块以及制造半导体光学元件的方法

Semiconductor optical element, optical module and method of manufacturing semiconductor optical element
Abstract:
A semiconductor optical element and an optical module in which extinction ratio variation among integrated optical modulation elements is reduced. An optical module has a wavelength multiplexer that multiplexes light respectively emerging from electric-field-absorption modulator (EAM) portions of integrated optical modulation elements, and that outputs the multiplexed light. The integrated optical modulation element has a signal input terminal, a laser element portion, and an EAM portion. Each of the integrated optical modulation elements has a difference between an oscillation wavelength and a barrier layer bandgap wavelength, represented as an LDBG wavelength difference. Variation of the LDBG wavelength differences is limited within a range of ±1 nm.
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