Invention Grant
- Patent Title: Electronic device and manufacturing method thereof, electronic apparatus, and moving body
- Patent Title (中): 电子设备及其制造方法,电子设备和移动体
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Application No.: US13855035Application Date: 2013-04-02
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Publication No.: US09247664B2Publication Date: 2016-01-26
- Inventor: Teruo Takizawa
- Applicant: Seiko Epson Corporation
- Applicant Address: JP
- Assignee: Seiko Epson Corporation
- Current Assignee: Seiko Epson Corporation
- Current Assignee Address: JP
- Agency: Harness, Dickey & Pierce, P.L.C.
- Priority: JP2012-085863 20120404; JP2013-028186 20130215
- Main IPC: G01C19/56
- IPC: G01C19/56 ; G01P1/02 ; H05K5/06 ; H05K13/00 ; G01C19/5719 ; G01P15/097 ; G01P15/125 ; G01C19/5747 ; B81B7/00 ; B81B7/02

Abstract:
An electronic device includes a substrate, a cover body which is placed on the substrate, a first cavity which is surrounded by the substrate and the cover body, and a second cavity which is surrounded by the substrate and the cover body, wherein an inner portion of the first cavity is sealed in a first air pressure atmosphere, and an inner portion of the second cavity is sealed in a second air pressure atmosphere which has a difference of air pressure with respect to the first air pressure atmosphere, a first through-hole, which communicates with the first cavity and is blocked by a seal member, is provided in at least one of the substrate and the cover body, and the first cavity and the second cavity are isolated from each other by a partition wall portion which is integrally provided to the cover body or the substrate.
Public/Granted literature
- US20130265701A1 ELECTRONIC DEVICE AND MANUFACTURING METHOD THEREOF, ELECTRONIC APPARATUS, AND MOVING BODY Public/Granted day:2013-10-10
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