Invention Grant
- Patent Title: Method for manufacturing ferroelectric film
- Patent Title (中): 铁电薄膜的制造方法
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Application No.: US14235207Application Date: 2011-07-29
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Publication No.: US09248589B2Publication Date: 2016-02-02
- Inventor: Takeshi Kijima , Yuuji Honda
- Applicant: Takeshi Kijima , Yuuji Honda
- Agency: Wenderoth, Lind & Ponack, L.L.P.
- International Application: PCT/JP2011/067909 WO 20110729
- International Announcement: WO2013/018232 WO 20130207
- Main IPC: B29C39/00
- IPC: B29C39/00 ; C01G33/00 ; H01L21/02

Abstract:
To provide a method for manufacturing a ferroelectric film formed of a lead-free material. The method for manufacturing a ferroelectric film according to an aspect of the present invention is a method for manufacturing a ferroelectric film including the steps of pouring a sol-gel solution for forming (K1-XNaX)NbO3 into a mold 3, calcining the sol-gel solution to form a (K1-XNaX)NbO3 material film inside the mold 3, heat-treating and crystallizing the (K1-XNaX)NbO3 material film in an oxygen atmosphere to form a (K1-XNaX)NbO3 crystallized film inside the mold 3 and removing the mold 3 through etching, and is characterized in that the mold 3 is more easily etched than the (K1-XNaX)NbO3 crystallized film and the X satisfies a formula below 0.3≦X≦0.7.
Public/Granted literature
- US20140225317A1 METHOD FOR MANUFACTURING FERROELECTRIC FILM Public/Granted day:2014-08-14
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